Atom-Based Standards

NIST unveils atom-based standards. ‘Device features on computer chips as small as 40 nanometers (nm) wide–less than one-thousandth the width of a human hair–can now be measured reliably thanks to new test structures developed by a team of physicists, engineers, and statisticians at the Commerce Department’s National Institute of Standards and Technology (NIST), SEMATECH, and other collaborators. The test structures are replicated on reference materials that will allow better calibration of tools that monitor the manufacturing of microprocessors and similar integrated circuits.’



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